The Clean Room Laboratory

The university has its own 200 m2 clean room laboratory for the manufacture and characterisation of microsystems. This laboratory is used in both the bachelor’s and master’s degree programmes as well as for research purposes and doctoral work.

The scientific equipment that is set up in the clean room includes:

• Electronic Visions double-sided mask aligning equipment
• Electronic Visions wafer registration equipment for wafer lamination
• Electronic Visions wafer bonds for thermo compression, fusion and anodic bonding
• Convac automatic spinner
• Convac automatic developer
• MAT 6400 Flip-Chip bonder
• Veeco NT9100 Interferometric Microscope
• Delvotec automatic wire bonder
• Delvotec pull/shear tester
• Dektak 150 Surface Profiler
• Open testing installation for electroplating of Cu, Au and Sn
• Plasma-Therm Reactive Ion Etch (RIE) equipment. UV and Plasma cleaning
• Thermal oxidation oven
• Laboratory benches for wet etching and wet chemistry
• Individual equipment for probing and characterisation