Micro and nanotechnology

A micro and nanosystem product contains one or more sensors (feelers), microelectronics, and perhaps a microactuator (micromachine). The product may contain mechanical, electronic, optical, hydraulic or combined functions. Lots of different materials, like silicone, plastic, glass and metals are used. There is a long series of processes involved in manufacturing a microsystem product.

The processes within micro and nanotechnology use photographic transfer of patterns to a basic material. Materials that are included in a microsystem are applied using thin film methods, among other things. These materials are microshaped using photographic methods and etching methods. Methods for microassembly, encapsulation (packaging) and testing are used before the products are ready for use. Microsystems are key components in a completed larger system and determine some of the most important characteristics of the system.

The concepts of micro and nano

In a micro and nanosystem, two or more electrical, mechanical, optical, chemical, biological, magnetic functions or other properties are combined in a miniaturised module. There are therefore clear academic relationships to specialised areas; physics, electronics, mechanics, chemistry and biology. Sensors, actuators and energy supply are important parts of a microsystem. As a rule, the electronic signal processing is done in the form of an ASIC. In addition, a lot of emphasis is placed on methods of integration, construction, packaging and quality assurance for a microsystem, where the trend towards three-dimensional heterogeneous building methods is particularly significant.